Wafer Level Reliability (WLR) (Semiconductor Academy 2)

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**课程名称:**Wafer Level Reliability (WLR) (Semiconductor Academy 2) **课程概述:** 本课程为“半导体学院2”系列课程,提供对晶圆级可靠性(Wafer Level Reliability, WLR)和半导体工艺及器件的资格认证进行全面概述。您将学习关键概念、行业标准和最佳实践,掌握最先进的知识和技能,以便为半导体代工厂设计、测试和认证可靠的工艺/晶体管。 **课程内容:** * **FEOL/BEOL工艺资格认证:** 学习如何根据相应的行业标准对工艺/器件进行资格认证。 * **寿命模型:** 学习预测晶体管在真实世界条件下的寿命的方法,并展示典型的MOSFET可靠性失效机制。 * **晶圆级可靠性(WLR):** 涵盖 TDDB(时序依赖介电击穿)、Gox VBD(栅氧化层击穿电压)、缺陷模式、PID(等离子体感应损伤)、BTI(偏置温度不稳定性)、HCI(热载流子注入)、EM(电迁移)、SM(应力迁移)等。 * **老化模型和老化仿真概念。** **课程目标:** * 理解可靠性在半导体行业中的重要性。 * 学习关键的可靠性概念和方法。 * 掌握行业标准和测试程序的实践知识。 **学习成果:** * 将可靠性原理应用于实际工作中。 * 进行有效的可靠性测试,并设计/选择适用的测试条件。 * 为开发可靠的晶体管可靠性做出贡献。 **总结:** 本课程涵盖了晶圆级可靠性和半导体工艺资格认证的关键概念、行业标准和最佳实践。

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This course provides a comprehensive overview of wafer level reliability and qualification for semiconductor process and devices. You'll learn critical concepts, industry standards, and best practices, equipping you with the state-of-the-art knowledge and skills to design, test, and qualify reliable process/transistor for the semiconductor foundries.What you will learn in this class ? FEOL/BEOL Process Qualification, we will teach you how to qualify process/device with the corresponding Industry Standard. Lifetime Models: you will learn the methods to predict transistor life under real-world conditions. We will show you the typical MOSFET reliability failure mechanisms. Wafer Level Reliability: including TDDB (time dependent dielectric breakdown), Gox VBD (gate oxide breakdown voltage), Defect Modes, PID (plasma induced damage), BTI (bias temeperature instability), HCI (hot carrier injection), EM (electromigration), SM (stress migration). Concepts of Aging Model and Aging SimulationCourse Objectives: Understand the importance of reliability in the semiconductor industry.Learn key reliability concepts and methods.Gain hands-on knowledge of industry standards and test procedures.Learning Outcomes: Apply reliability principles to your work.Perform effective reliability testing and design/choose applicable test condition. Contribute to the development of reliable transistor reliability. This course covered key concepts, industry standards, and best practices for wafer level reliability and qualification of semiconductor process.

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