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所在平台: Udemy |
课程主页: https://www.udemy.com/course/micro-electromechanical-systems-mems-technology/
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**课程名称：** 微机电系统 (MEMS) 技术 **课程概述：** 本课程深入探讨微机电系统 (MEMS) 的核心技术，主要聚焦于微制造技术。MEMS 设备的应用已遍及全球，现已成为工业、汽车、生物医疗、家用电器、手机以及可穿戴设备中绝大多数传感器和执行器的基础。得益于其小型化、低成本、高效率和可靠性等优势，MEMS 传感器和设备在过去几十年中迅速占据了巨大的市场份额。 随着智能和自主系统、物联网 (IoT) 以及人工智能 (AI) 和 AI-OTs 等新兴技术的蓬勃发展，MEMS 传感器和设备的市场需求和应用范围正不断扩大。 课程内容涵盖但不限于： * **硅基制造工艺：** 光刻、湿法和干法刻蚀中的图形转移、掩膜技术、表面微加工、体微加工、LIGA 和微成型、SU-8 成型以及电镀。 * **软光刻技术：** 介绍软光刻等低成本微制造技术。 * **MEMS 生产环境：** 简要介绍 MEMS 传感器和执行器生产所需的洁净室及其使用规则（注意事项与禁忌）。 * **制造方法：** 顶向下和底向上制造。 * **多用户 MEMS 工艺 (MUMPs)：** 涵盖 Poly MUMPs, Metal MUMPs, Silicon-On-Insulator MUMPs。 * **关键工艺工具：** L-Edit 在光刻掩膜制作中的应用。 * **MEMS 器件类型：** 微传感器、微执行器、微流控、功率 MEMS、芯片实验室 (Lab on a Chip)。 **总结：** 本课程为学习者提供了一个全面了解 MEMS 技术及其相关制造工艺的平台，并重点介绍了 MEMS 技术在当前及未来各类高科技应用中的重要地位和发展前景。
This course is about the microfabrication techniques and micro electromechanical systems (MEMS) technology. Applications of MEMS based devices are all over the globe. Mostly all sensors and actuators used in industry, automobiles, biomedical devices, domestic appliances, cell phones and wearable gadgets are MEMS based. In last few decades, due to small size, low cost and high efficiency and reliability, MEMS based sensors and devices have captured a huge market. Moreover, MEMS based sensors applications and usage is more spreading and are high in demand due to the emerging technologies, like, smart and autonomous systems, internet of things (IOTs), artificial intelligence (AI) and AI-OTs. The silicon (Si) based technology comprised of processes of photo-lithography, pattern transfer with wet and dry etching techniques, masking, surface micromachining, bulk micromaching, LIGA and micromolding and SU-8 molding and electroplating, soft lithography techniques will be discussed. Furthermore, the cleanroom where these MEMS sensors and actuators are produced is also briefly elaborated along do's and don'ts of cleanroom. Moreover, the course also include: Top-down and bottom-up manufacturing, Multi-User MEMS-Process, Poly MUMPs, Metal MUMPs, Silicon-On-Insulator MUMPs, Low cost microfabrication techniques, Soft lithography techniques, Mask making in L-Edit (photolithography), Micro sensors, micro actuators, micro fluidics, power MEMS, lab on the chip.
