Micro and Nanofabrication (MEMS)

开始时间: 04/22/2022 持续时间: 7 weeks

所在平台: EdxArchive

课程类别: 其他类别

大学或机构: epflx

授课老师: Juergen Brugger Martin Gijs

课程主页: https://www.edx.org/archive/micro-nanofabrication-mems-epflx-memsx-0

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课程详情

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.

In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment. 

课程大纲

  • How to select the correct fabrication process for a specific micro-device or microsystem
  • Establish the workflow for the cleanroom processes
  • Identify how physical and chemical phenomena govern miniaturized systems for various applications
  • Resource planning for a given microsystem fabrication

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课程简介

Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.

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