Micro and Nanofabrication (MEMS)

开始时间: 04/22/2022 持续时间: 8 weeks

所在平台: EdxArchive 课程类别: 其他类别 大学或机构: epflx 授课老师： Juergen Brugger Martin Gijs

课程主页: https://www.edx.org/archive/micro-nanofabrication-mems-epflx-memsx

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课程详情

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.

In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment. For some selected examples, students will also be able to set process parameters on a virtual panel to see how it affects the processing results.

课程大纲

• How to select the correct fabrication process for a specific micro-device or microsystem
• Establish the workflow for the cleanroom processes
• Identify how physical and chemical phenomena govern miniaturized systems for various applications
• Resource planning for a given microsystem fabrication

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