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所在平台: Coursera |
课程主页: https://www.coursera.org/learn/semiconductor-process-1
课程评论：没有评论
课程名称：半导体工艺入门1 概述：本课程旨在提供对半导体工艺的整体理解。课程将探讨半导体器件和工艺的原理及基本理论。学生将学习完整的半导体工艺，包括氧化、扩散、离子注入、光刻、刻蚀、薄膜沉积、等离子体、金属化和封装等内容。 注册后可下载讲义，帮助学生观看视频。课程中还设有测验题，以检测学习效果。 课程大纲：
第1周：MOSFET理论概述
第2周：CMOS工艺集成
第3周：洁净室、RCA清洗、晶体生长
第4周：扩散与掺杂
第5周：氧化
第6周：离子注入
第7周：光刻
第8周：极紫外光（EUV）光刻
Name:Week 1 Overview of MOSFET theory
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Name:Week 2 CMOS Process Integration
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Name:Week 3 Cleanroom, RCA Cleaning Crystal Growth
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Name:Week 4 Diffusion & Doping
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Name:Week 5 Oxidation
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Name:Week 6 Ion Implantation
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Name:Week 7 Lithography
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Name:Week 8 EUV Lithography
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This course aims to provide a general understanding of semiconductor process. This course explores the principles and basic theory of semiconductor device and process. Furthermore, the students will learn the overall semiconductor process such as oxidation, diffusion, ion implantation, lithography, etching, thin film deposition, plasma, metallization, and packaging. The lecture notes can be downloaded with registration, that helps students watch the videos. There are quiz problems to check
