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所在平台: Coursera |
课程主页: https://www.coursera.org/learn/nanotechnology
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课程名称：纳米技术：创客课程 课程概述： 本课程探讨如何创建比人类头发直径小1万倍的纳米结构，以及如何在纳米尺度上进行观察。通过教学和实验室演示，学生将深入理解纳米技术工具的能力，以及如何使用这些设备进行纳米级别的制造和表征。纳米尺度是创客文化的下一个前沿，本课程将为你介绍将纳米技术理念转化为实际形态的实践知识、技能和工具，并能够对纳米尺度的物体进行成像。 本课程由纳米制造、电子束显微镜和纳米表征领域的专家通过研究三角洲纳米技术网络（RTNN）开发。RTNN通过美国国家纳米技术协调基础设施项目为学校和工业提供培训和工具的使用，课程中展示的工具向公众开放。 课程大纲： 1. **纳米技术介绍**： 学习纳米制造和纳米表征技术的基础知识及其在商业产品中的具体应用，理解清洁室和真空环境对纳米技术产品制造的重要性，以及如何利用光、X射线和电子束对纳米尺度物体进行表征。 2. **纳米测量与表征工具：扫描电子显微镜与能量色散X射线光谱**： 说明扫描电子显微镜中的样品准备和成像技术，探讨环境扫描电子显微镜的优势，并学习如何结合使用能量色散X射线光谱获取样品的元素信息。 3. **纳米测量与表征工具：透射电子显微镜**： 学习透射电子显微镜和冷冻透射电子显微镜的基本功能以及样品的准备和成像方法。 4. **纳米测量与表征工具：X射线和光学表征**： 观看微计算机断层扫描、X射线光电子光谱和光谱技术的演示，了解设备的基本功能及样品的准备和测量方法。 5. **纳米制造：真空泵与薄膜真空沉积**： 探索纳米制造中真空环境的必要性，比较三种真空泵的操作方式，学习使用溅射蒸发、电子束蒸发和热蒸发等三种方法进行薄膜沉积。 6. **纳米制造：气相沉积**： 学习使用薄膜技术进行纳米技术制造的方法，描述和比较原子层沉积、化学气相沉积及等离子体增强化学气相沉积。 7. **纳米制造：图案化与自组装**： 研究纳米技术中使用的五种图案化方法，解释光刻、电子束光刻、离子束光刻、热压印以及自组装的基本过程。 8. **纳米制造：刻蚀**： 学习描述和比较湿法和干法刻蚀过程，这些过程用于在纳米制造中选择性地去除材料。 9. **课程总结**： 综合各模块的学习内容，回顾纳米技术的关键概念和应用。
Name:Introduction to Nanotechnology
Description:Welcome to Nanotechnology! In this module, you will learn some of the basics of nanofabrication and nanocharacterization techniques as well as specific applications of nanotechnology in commercial products. You’ll be able to explain why a cleanroom and vacuum environment are necessary for creating nanotechnology products. Finally, you will be able to explain how we use light, x-rays, and electron beams to characterize objects at the nanoscale. For more detailed learning objectives for each video, please see the first reading.
Name:Nano Measurement and Characterization Tools: Scanning Electron Microscopy and Energy-Dispersive X-ray Spectroscopy
Description:After this module, you will be able to explain sample preparation and imaging techniques used in scanning electron microscopy. You will also be able to explain the benefits of environmental scanning electron microscopy. Furthermore, you will discover how energy-dispersive x-ray spectroscopy can be paired with scanning electron microscopy to gain elemental information about samples.
Name:Nano Measurement and Characterization Tools: Transmission Electron Microscopy
Description:In this module, we will look at transmission electron microscopy and cryo-transmission electron microscopy. You will learn to describe the basic function of the equipment as well as how samples are prepared and imaged using these techniques.
Name:Nano Measurement and Characterization Tools: X-ray and Optical Characterization
Description:In this module, we will see demonstrations of micro-computed tomography, X-ray photoelectron spectroscopy, and optical spectroscopy. You will learn the basic function of the equipment and how samples are prepared and measured.
Name:Nanofabrication: Vacuum Pumps and Thin Film Vacuum Deposition
Description:In this module, we will discover how and why a vacuum environment is required in nanofabrication, compare the operation of three types of vacuum pumps, and look at vacuum deposition of thin films using three different methods: sputter evaporation, e-beam evaporation and thermal evaporation.
Name:Nanofabrication: Vapor Deposition
Description:We will look at some techniques for making things with nanotechnology using thin film techniques; in this module you will learn to describe and compare atomic layer deposition, chemical vapor deposition, and plasma-enhanced chemical vapor deposition.
Name:Nanofabrication: Patterning and Self-Assembly
Description:In this module, we will investigate 5 different methods used in nanotechnology for patterning. You will be able to explain the basic processes of photolithography, e-beam lithography, ion beam lithography, hot embossing, and self-assembly.
Name:Nanofabrication: Etching
Description:In this module, you will learn to describe and compare wet and dry etching processes. These processes are used to selectively remove material in nanofabrication.
Name:Closing
Description:
How can we create nano-structures that are 10,000 times smaller than the diameter of a human hair? How can we “see” at the nano-scale? Through instruction and lab demonstrations, in this course you will obtain a rich understanding of the capabilities of nanotechnology tools, and how to use this equipment for nano-scale fabrication and characterization. The nanoscale is the next frontier of the Maker culture, where designs become reality. To become a Nanotechnology Maker pioneer, we will introduce you to the practical knowledge, skills, and tools that can turn your nanotechnology ideas into physical form and that enable you to image objects at the nano-scale. This course has been developed by faculty and staff experts in nano-fabrication, electron beam microscopy, and nano-characterization through the Research Triangle Nanotechnology Network (RTNN). The RTNN offers training and use of the tools demonstrated in this course to schools and industry through the United States National Nanotechnology Coordinated Infrastructure program. The tools demonstrated in this course are available to the public through the RTNN.
