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所在平台: Coursera |
课程主页: https://www.coursera.org/learn/micro-electromechanical-systems
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课程名称：微电机械系统（MEMS） 课程概述：本课程旨在帮助学员掌握微电机械系统（MEMS）的潜力，提供全面的知识和实践技能，以便在这一变革性领域中脱颖而出。 课程内容深入探讨MEMS技术的基本概念、材料及其制造技术，并研究其如何在各个行业中引发变革。课程从基础的MEMS原理开始，逐步深入到先进的传感器制造和表征方法，提供了全面的学习路径。 课程大纲： 1. **入门模块**：该模块概述了学员在课程中将学习的内容。 2. **MEMS及材料性质简介**：介绍MEMS的技术和应用，探索MEMS制造中使用的关键材料，学习清洁室协议，为理解MEMS系统中的材料、机械结构和电子组件之间的相互作用打下基础。 3. **MEMS传感器制造技术 - 氧化与物理气相沉积**：聚焦于MEMS制造中的氧化过程和物理气相沉积（PVD）方法，学习电子束蒸发和热蒸发等技术，以及热氧化在传感器制造中的应用，包括氧化过程和沉积技术的数值计算。 4. **MEMS传感器制造技术 - 物理和化学气相沉积技术**：继续探索MEMS传感器制造技术，强调PVD溅射和化学气相沉积（CVD），了解薄膜沉积的溅射过程和CVD技术在高质量传感器材料中的应用，区分PVD和CVD的具体应用。 5. **MEMS传感器制造技术 - 光刻**：深入光刻工艺，学习光刻在微结构图案化中的关键技术和不同阶段，以及相关的数值计算，了解光刻在各种MEMS应用中的使用。 6. **MEMS传感器制造技术 - 微加工**：涵盖微加工技术，包括体和表面微加工，学习MEMS基础的挥发性有机化合物传感器的开发，以及深反应离子刻蚀（DRIE）和反应离子刻蚀（RIE）等先进技术，介绍湿法刻蚀和结晶结构的米勒指数概念。 7. **传感器与接口技术**：学习MEMS应用中传感器集成和接口技术，包括3D打印、PCB设计、雷达传感器和传感器通信协议，了解MEMS传感器与电子系统之间的接口方法及传感器输出的处理和传输。 8. **MEMS传感器的表征与应用**：关注评估MEMS传感器性能的表征技术，讨论其在医疗、航空航天和消费电子等行业的实际应用，学习导线键合技术及各种表征MEMS设备的方法。 通过本课程，学员将获得在MEMS领域发展的知识基础和实践技能。
Name:Get Started!
Description:This module will give you a glimpse of what you will be learning in the course.
Name:Introduction to MEMS and Material Properties
Description:This module introduces students to the world of Micro Electromechanical Systems (MEMS), providing a broad overview of its technology and applications. Students will explore the key materials used in MEMS fabrication and gain practical knowledge of cleanroom protocols essential for the development of MEMS devices. This module lays the foundation for understanding the interplay between materials, mechanical structures, and electronic components that form MEMS systems.
Name:MEMS Sensor Fabrication Techniques - Oxidation & Physical Vapour Deposition
Description:This module focuses on the techniques used in MEMS fabrication, specifically oxidation processes and Physical Vapor Deposition (PVD) methods. Students will explore techniques like electron-beam (E-beam) evaporation and thermal evaporation, while also learning how thermal oxidation is used to develop layers for sensor fabrication. The module will also cover numerical calculations for oxidation processes and deposition techniques.
Name:MEMS Sensor Fabrication Techniques - Physical and Chemical Vapour Deposition Techniques
Description:This module continues exploring MEMS sensor fabrication techniques with an emphasis on PVD sputtering and Chemical Vapor Deposition (CVD). Students will learn about the sputtering process used to deposit thin films and how CVD techniques are used to create high-quality sensor materials. By the end of this module, students will be able to differentiate between PVD and CVD processes and understand their specific applications in MEMS.
Name:MEMS Sensor Fabrication Techniques – Lithography
Description:In this module, students will dive into the lithographic processes used in MEMS fabrication. Photolithography is a critical technique for patterning microstructures, and students will explore its different stages and techniques. This module also covers numerical calculations related to lithography and discusses how lithography is used in various MEMS applications.
Name:MEMS Sensor Fabrication Techniques – Micromachining
Description:This module covers micromachining techniques, including bulk and surface micromachining, that are integral to MEMS sensor fabrication. Students will learn about the development of MEMS-based VOC sensors, and explore advanced techniques like Deep Reactive Ion Etching (DRIE) and Reactive Ion Etching (RIE). The module also introduces wet etching processes and the concept of Miller indices in crystalline structures.
Name:Sensors & Interfacing Techniques
Description:In this module, students will learn about sensor integration and interfacing techniques essential for MEMS applications. Topics will include 3D printing, PCB design, radar sensors, and sensor communication protocols. Students will also gain practical knowledge of interfacing MEMS sensors with electronic systems, exploring encoding methods and how sensor outputs are processed and transmitted.
Name:Characterization & Applications of MEMS Sensors
Description:This final module focuses on the characterization techniques used to assess MEMS sensor performance and explore their real-world applications. Students will learn about wire bonding techniques and various methods for characterizing MEMS devices. Practical applications of MEMS sensors in industries like healthcare, aerospace, and consumer electronics will also be discussed
Unlock the potential of Micro Electromechanical Systems (MEMS) with this comprehensive course, designed to equip you with the knowledge and hands-on skills to excel in this transformative field. Dive deep into the essential concepts, materials, and fabrication techniques that power MEMS technology, and explore how it is revolutionizing industries. From understanding foundational MEMS principles to mastering advanced sensor fabrication and characterization methods, this course offers a step-by-s
