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所在平台: Coursera |
课程主页: https://www.coursera.org/learn/electron-and-ion-beam-characterization
课程评论：没有评论
课程名称：电子束和离子束表征 课程概述：电子束和离子束广泛应用于半导体材料和器件的定性和定量分析。它们可以以亚纳米分辨率成像结构，并提供有关元素组成和掺杂浓度的信息。本课程介绍电子束和离子束表征的基础知识，并包括一个分析太阳能电池表面粗糙度的项目。 课程大纲： - 课程介绍：本部分介绍电子束和离子束的基本概念及其在半导体分析中的应用。 - 第4周.1：扫描电子显微镜：介绍扫描电子显微镜的概念及其在样品定性和定量分析中的应用。 - 第4周.2：奥吉电子谱：学习奥吉电子发射谱的原理，这是一种强大的表面分析技术。 - 第4周.3：次级离子质谱：了解次级离子质谱如何用于测量半导体中成分材料的浓度和分布。 - 第4周.4：课程总结与项目：完成案例研究，评估使用扫描电子显微镜获取的图像进行定量表面分析的能力。
Name:Course Introduction
Description:Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.
Name:Week 4.1: Scanning Electron Microscopy
Description:This week introduces the concepts of scanning electron microscopy and how it is used for both qualitative and quantitative sample analysis.
Name:Week 4.2: Auger Electron Spectroscopy
Description:This week, you will learn about Auger electron emission spectroscopy, a powerful technique for surface analysis.
Name:Week 4.3: Secondary Ion Mass Spectroscopy
Description:This week, you will learn about secondary ion mass spectroscopy and how it is used to measure the concentration and distribution of constituent materials in semiconductors.
Name:Week 4.4: Course Wrap-up and Project
Description:This week, you will complete a case study to assess your ability to use images obtained from an SEM for quantitative surface analysis.
Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.
